Journal Article

FZJ-2018-05908

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Epitaxial GeSn: impact of process conditions on material quality

Loo, R. (Corresponding author) ; Shimura, Y. ; Ike, S. ; Vohra, A. ; Stoica, T. ; Stange, D.FZJ* ; Buca, D. M.FZJ* ; Kohen, D. ; Margetis, J. ; Tolle, J.

2018
IOP Publ. Bristol

This record in other databases:  

Please use a persistent id in citations: doi:10.1088/1361-6641/aae2f9

Abstract: The electrical and optical material properties of epitaxial Ge1−xSnx and SiyGe1−x−ySnx are of high interest for novel device applications. However, the limited Sn solubility in Ge makes the epitaxial growth of Ge1−xSnx and SiyGe1−x−ySnx challenging. Most of the literature describing the epitaxial growth is for Ge2H6 and SnCl4 as Ge and Sn precursors, respectively. A more recent publication deals with the epitaxial growth of high-quality Ge1−xSnx with the more conventional GeH4. In this manuscript, we compare the structural and optical material quality of Ge1−xSnx, epitaxially grown on Ge virtual substrates as a function of growth pressure, growth temperature, the choice of the carrier gas (H2 or N2) and the choice of the Ge precursor (GeH4 versus Ge2H6). The best material quality in terms of surface morphology and photoluminescence characteristics is obtained if GeH4 is used as a Ge precursor. For Ge1−xSnx grown with Ge2H6 and at atmospheric pressure, pyramidical defects can be seen and there is a risk for uncontrolled local Sn agglomeration. The pyramidical defects are not observed on Ge1−xSnx layers grown at reduced pressure, but the highest achievable substitutional Sn concentration is lower. No pyramidical defects are found for Ge1−xSnx layers grown with GeH4 and the issue of uncontrolled local Sn agglomeration does not appear.

---

Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2018

---

Database coverage:
; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; National-Konsortium ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Web of Science Core Collection

---