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Steep slope negative capacitance FDSOI MOSFETs with ferroelectric HfYOx

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2018
IEEE Piscataway, NJ
ISBN: 978-1-5386-4811-7, 9781538648100, 9781538648124 (print)

2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), GranadaGranada, Spain, 19 Mar 2018 - 21 Mar 20182018-03-192018-03-21 Piscataway, NJ : IEEE 1-3 () [10.1109/ULIS.2018.8354733]

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Abstract: Steep slope negative capacitance MOSFETs with HfYOx ferroelectric on FDSOI were experimentally demonstrated. An average SS of 30 mV/dec was achieved over 3 decades of drain current. We found that the subthermal SS degrades with the sweeping numbers, which is assumed to be caused by the traps in the ferroelectric oxide layer.


Contributing Institute(s):
  1. Halbleiter-Nanoelektronik (PGI-9)
Research Program(s):
  1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2018
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Dokumenttypen > Ereignisse > Beiträge zu Proceedings
Dokumenttypen > Bücher > Buchbeitrag
Institutssammlungen > PGI > PGI-9
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