Journal Article

FZJ-2020-04180

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Nano-LED induced chemical reactions for structuring processes

Mikulics, M.FZJ* ; Sofer, Z. (Corresponding author) ; Winden, A. ; Trellenkamp, S.FZJ* ; Förster, B.FZJ* ; Mayer, J.FZJ* ; Hardtdegen, H. H.FZJ*

2020
Royal Society of Chemistry Cambridge

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Please use a persistent id in citations: http://hdl.handle.net/2128/26334  doi:10.1039/D0NA00851F

Abstract: We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the fabrication of holes in the resist down to ∼75 nanometres in diameter. In contrast, the nano-LEDs can also be employed in the far-field regime to expose thin films of the monomer bisphenol A-glycidyl methacrylate (Bis-GMA) and to initialize polymerization locally. Photosensitive films were patterned and spherical cone-shaped three dimensional objects with diameters ranging from ∼480 nm up to 20 micrometres were obtained. The modification in the material as a result of the photochemical reaction induced i.e. by polymerization was confirmed by Raman spectroscopy. This structuring maskless technique has the potential to induce substantial changes in photosensitive molecules and to produce the desired structures from the tens of microns down to the nanometre scale.

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Contributing Institute(s):

1. Materialwissenschaft u. Werkstofftechnik (ER-C-2)

Research Program(s):

1. 143 - Controlling Configuration-Based Phenomena (POF3-143) (POF3-143)

Appears in the scientific report 2020

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Database coverage:
; ; ; ; Clarivate Analytics Master Journal List ; DOAJ Seal ; Emerging Sources Citation Index ; Web of Science Core Collection

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