Journal Article FZJ-2024-02322

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Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping

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2023
Wiley-VCH Weinheim

Physica status solidi / A 220(13), 2300066 () [10.1002/pssa.202300066]

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Contributing Institute(s):
  1. Materialwissenschaft u. Werkstofftechnik (ER-C-2)
Research Program(s):
  1. 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535) (POF4-535)

Appears in the scientific report 2024
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Medline ; Creative Commons Attribution CC BY 4.0 ; OpenAccess ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; DEAL Wiley ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection
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Open Access

 Datensatz erzeugt am 2024-04-08, letzte Änderung am 2025-02-03


OpenAccess:
Physica Status Solidi a - 2023 - Frentzen - Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon - Volltext herunterladen PDF
FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02 - Volltext herunterladen PDF
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