Journal Article

PreJuSER-111873

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Pulsed laser ablation of complex oxides: The role of congruent ablation and preferential scattering for the film stoichiometry

Wicklein, S.FZJ* ; Sambri, A. ; Amoruso, S.FZJ* ; Wang, X. ; Bruzzese, R. ; Koehl, A.FZJ* ; Dittmann, R.FZJ*

2012
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/7805  doi:10.1063/1.4754112

Abstract: By combining structural and chemical thin film analysis with detailed plume diagnostics and modeling of the laser plume dynamics, we are able to elucidate the different physical mechanisms determining the stoichiometry of the complex oxides model material SrTiO3 during pulsed laser deposition. Deviations between thin film and target stoichiometry are basically a result of two effects, namely, incongruent ablation and preferential scattering of lighter ablated species during their motion towards the substrate in the O-2 background gas. On the one hand, a progressive preferential ablation of the Ti species with increasing laser fluence leads to a regime of Ti-rich thin film growth at larger fluences. On the other hand, in the low laser fluence regime, a more effective scattering of the lighter Ti plume species results in Sr rich films. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4754112]

Keyword(s): J

Note: The research has received funding from European Union Seventh Framework Programme (FP7/2007-2013) under Grant Agreement No. 264098-MAMA and the Deutsche Forschungsgemeinschaft (SFB 917). We thank C. Aruta and E. Di Gennaro for their valuable help.

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Contributing Institute(s):

1. Elektronische Materialien (PGI-7)
2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)

Research Program(s):

1. Grundlagen für zukünftige Informationstechnologien (P42)
2. MAMA - Unlocking research potential for multifunctional advanced materials and nanoscale phenomena (264098) (264098)

Appears in the scientific report 2012

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Database coverage:
; ; ; Allianz-Lizenz / DFG ; Current Contents - Social and Behavioral Sciences ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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