Journal Article

FZJ-2013-02688

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Millisecond flash lamp annealing for LaLuO3 and LaScO3 high-k dielectrics

Lehmann, J. (Corresponding author) ; Hübner, R. ; Borany, J. V. ; Skorupa, W. ; Mikolajick, T. ; Schäfer, A.FZJ* ; Schubert, J.FZJ* ; Mantl, S.FZJ*

2013
Elsevier [S.l.] @

This record in other databases:    

Please use a persistent id in citations: doi:10.1016/j.mee.2013.04.021

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 421 - Frontiers of charge based Electronics (POF2-421) (POF2-421)

Appears in the scientific report 2013

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Database coverage:
; Current Contents - Life Sciences ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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