Gast ::
| Hauptseite > Publikationsdatenbank > Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies |
| Hauptseite > Publikationsdatenbank > Preparation of microcrystalline silicon with the layer-by-layer technique at various plasma excitation frequencies |
| Contribution to a conference proceedings/Journal Article | FZJ-2013-05395 |
; ; ; ; ;
1996
MRS
Warrendale, Pa.
; SCOPUS
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