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Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes

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2002
American Institute of Physics Melville, NY

Applied physics letters 81, 4410 () [10.1063/1.1526926]

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Abstract: SrBi2Ta2O9 thin films were prepared by metalorganic decomposition on Pt/Ti/SiO2/Si substrates and subsequently crystallized at temperatures ranging from 600 to 700 degreesC for 40 to 225 min. Data of the Aurivillius surface coverage taken from atomic force microscopy measurements were used to model the kinetics of isothermal phase transformation from the fluorite to the Aurivillius phase. A two-dimensional growth mechanism at a decreasing nucleation rate can be deduced. By evaluating the temperature dependence of the growth rates, an activation energy for phase transformation of 318 kJ/mol is determined. (C) 2002 American Institute of Physics.

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Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Elektrokeramische Materialien (IFF-EKM)
Research Program(s):
  1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2002
Notes: Nachtrag
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