Journal Article

PreJuSER-32000

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer

Gerber, P. ; Roelofs, A. ; Lohse, O. ; Kügeler, C. ; Tiedke, S. ; Böttger, U. ; Waser, R.FZJ*

2003
American Institute of Physics [S.l.]

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Please use a persistent id in citations: http://hdl.handle.net/2128/1238  doi:10.1063/1.1544415

Abstract: An evolution of the double-beam laser interferometer used for piezoelectric measurements in ferroelectric thin films is reported. Measuring the d(33) hysteresis of a ferroelectric material using lock-in technique with large time constants requires a varying bias field to be applied to the sample over a long period of time. This long-term application leads to electrical stress during the measurement. We present a measurement technique using a different source for the applied field and a varied method for averaging the interferometric response. The measurement time for a complete d(33) hysteresis will be shortened down to several seconds. Also, the cycle frequency becomes comparable to electrical hysteresis measurements. Experimental results on quartz and Pb(Zr-(X),Ti(1-X))O-3 are given to demonstrate the capabilities of the interferometer and the new measurement method. (C) 2003 American Institute of Physics.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektrokeramische Materialien (IFF-EKM)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2003
Notes: This version is available at the following Publisher URL: http://rsi.aip.org

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