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Journal Article | FZJ-2017-01879 |
; ; ; ; ;
2017
American Institute of Physics
[S.l.]
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Please use a persistent id in citations: http://hdl.handle.net/2128/13877 doi:10.1063/1.4975832
Abstract: The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
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