Journal Article FZJ-2017-01879

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Low vibration laboratory with a single-stage vibration isolation for microscopy applications

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2017
American Institute of Physics [S.l.]

Review of scientific instruments 88(2), 023703 -1 - 023703-7 () [10.1063/1.4975832]

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Abstract: The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.

Classification:

Contributing Institute(s):
  1. Funktionale Nanostrukturen an Oberflächen (PGI-3)
  2. JARA-FIT (JARA-FIT)
Research Program(s):
  1. 141 - Controlling Electron Charge-Based Phenomena (POF3-141) (POF3-141)

Appears in the scientific report 2017
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Medline ; Creative Commons Attribution CC BY 4.0 ; OpenAccess ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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 Record created 2017-02-20, last modified 2022-09-30