Journal Article

FZJ-2018-04729

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png A Novel Gate-Normal Tunneling Field-Effect Transistor With Dual-Metal Gate

Glass, S.FZJ* ; Kato, K. ; Kibkalo, L.FZJ* ; Hartmann, J.-M. ; Takagi, S. ; Buca, D. M.FZJ* ; Mantl, S.FZJ* ; Qing-Tai, Z. (Corresponding author)FZJ*

2018
IEEE [New York, NY]

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Please use a persistent id in citations: http://hdl.handle.net/2128/19706  doi:10.1109/JEDS.2018.2864581

Abstract: In this combined experiment and simulation study we investigate a SiGe/Si based gatenormal tunneling field-effect transistor (TFET) with a pillar shaped contact to the tunneling junction which brings forth two significant advantages. The first, is improved electrostatics at the boundary of the tunneling junction which helps to diminish the influence of adverse tunneling paths, and thus, substantially sharpens the device turn on. The second, is a simplified fabrication of a dual-metal gate using a selfaligned process. We demonstrate the feasibility of the process and show the positive effect of a dual-metal gate in experiment. Overall the paper provides general guidelines for the improvement of the subthreshold swing in gate-normal TFETs which are not restrained to the material system.

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2018

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Database coverage:
; ; Current Contents - Engineering, Computing and Technology ; DOAJ Seal ; SCOPUS ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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