Journal Article

FZJ-2019-06553

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Stoichiometry Determination of Chalcogenide Superlattices by Means of X‐Ray Diffraction and its Limits

Hollermann, H. ; Lange, F. R. L. ; Jakobs, S. ; Kerres, P. ; Wuttig, M. (Corresponding author)FZJ*

2019
Wiley-VCH Weinheim

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Please use a persistent id in citations: doi:10.1002/pssr.201800577

Abstract: In this paper, the potential of stoichiometry determination for chalcogenide superlattices, promising candidates for next‐generation phase‐change memory, via X‐ray diffraction is explored. To this end, a set of epitaxial GeTe/Sb2Te3 superlattice samples with varying layer thicknesses is sputter deposited. Kinematical scattering theory is employed to link the average composition with the diffraction features. The observed lattice constants of the superlattice reference unit cell follow Vegard's law, enabling a straight‐forward and non‐destructive stoichiometry determination.

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Contributing Institute(s):

1. JARA Institut Green IT (PGI-10)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2019

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Database coverage:
; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Web of Science Core Collection

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