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| Hauptseite > Publikationsdatenbank > A high temperature dual-mode quartz crystal microbalance technique for erosion and thermal desorption spectroscopy measurements |
| Hauptseite > Publikationsdatenbank > A high temperature dual-mode quartz crystal microbalance technique for erosion and thermal desorption spectroscopy measurements |
| Journal Article | FZJ-2021-01720 |
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2020
American Institute of Physics
[S.l.]
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Please use a persistent id in citations: http://hdl.handle.net/2128/27602 doi:10.1063/5.0012028
Abstract: An improved quartz crystal microbalance measurement method is described, which allows us to determine erosion, implantation, and release rates of thin films, during changing temperatures and up to 700 K. A quasi-simultaneous excitation of two eigenmodes of the quartz resonator is able to compensate for frequency drifts due to temperature changes. The necessary electronics, the controlling behavior, and the dual-mode temperature compensation are described. With this improved technique, quantitative in situ temperature-programmed desorption measurements are possible and the quartz crystal microbalance can be used for quantification of thermal desorption spectroscopy measurements with a quadrupole mass spectrometer. This is demonstrated by a study of the retention and release behavior of hydrogen isotopes in fusion-relevant materials. We find that more than 90% of the deuterium implanted into a thin film of beryllium is released during a subsequent temperature ramp up to 500 K
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