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Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films
Baumgarten, L. (Corresponding author)FZJ* ; Szyjka, T.FZJ* ; Müller, M.FZJ*
2021
American Inst. of Physics
Melville, NY
This record in other databases:
Please use a persistent id in citations: http://hdl.handle.net/2128/29756 doi:10.1063/5.0035686
Contributing Institute(s):
- Elektronische Eigenschaften (PGI-6)
Research Program(s):
- 5211 - Topological Matter (POF4-521) (POF4-521)
Appears in the scientific report
2021
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