Journal Article

FZJ-2022-01382

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Investigation of Thermal Stability Effects of Thick Hydrogenated Amorphous Silicon Precursor Layers for Liquid‐Phase Crystallized Silicon

Bosan, H. A. (Corresponding author)FZJ* ; Beyer, W.FZJ* ; Breuer, U.FZJ* ; Finger, F.FZJ* ; Hambach, N.FZJ* ; Nuys, M.FZJ* ; Pennartz, F.FZJ* ; Amkreutz, D. ; Haas, S.FZJ*

2021
Wiley-VCH Weinheim

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Please use a persistent id in citations: http://hdl.handle.net/2128/31193  doi:10.1002/pssa.202000435

Abstract: The thermal stability of thick (≈4 μm) plasma-grown hydrogenated amorphous silicon (a-Si:H) layers on glass upon application of a rather rapid annealing step is investigated. Such films are of interest as precursor layers for laser liquid-phase crystallized silicon solar cells. However, at least half-day annealing at T ≈550 °C is considered to be necessary so far to reduce the hydrogen (H) content and thus avoid blistering and peeling during the crystallization process due to H. By varying the deposition conditions of a-Si:H, layers of rather different thermal stability are fabricated. Changes in the surface morphology of these a-Si:H layers are investigated using scanning electron microscopy and profilometry measurements. Hydrogen effusion, secondary-ion mass spectrometry (SIMS) depth profiling, and Raman spectroscopy measurements are also carried out. In summary, amorphous silicon precursor layers are fabricated that can be heated within 30 min to a temperature of 550 °C without peeling and major surface morphological changes. Successful laser liquid-phase crystallization of such material is demonstrated. The physical nature of a-Si:H material stability/instability upon application of rapid heating is studied.

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Contributing Institute(s):

1. Photovoltaik (IEK-5)

Research Program(s):

1. 1212 - Materials and Interfaces (POF4-121) (POF4-121)

Appears in the scientific report 2022

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; DEAL Wiley ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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