Tunable mechanical coupling between driven microelectromechanical resonators

Verbiest, G. J.; Buca, D.; Barzanjeh, S.; Goldsche, M.; Xu, D.; Stampfer, C.; von den Driesch, N.; Khodkov, T.

doi:10.1063/1.4964122

Journal Article

FZJ-2017-00239

Tunable mechanical coupling between driven microelectromechanical resonators

Verbiest, G. J. (Corresponding author)RWTH* ; Xu, D.RWTH* ; Goldsche, M.FZJ* ; Khodkov, T.FZJ* ; Barzanjeh, S. ; von den Driesch, N.FZJ* ; Buca, D.FZJ* ; Stampfer, C.RWTH*FZJ*

2016
American Inst. of Physics Melville, NY

Applied physics letters 109(14), 143507 (2016) [10.1063/1.4964122]

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Please use a persistent id in citations: http://hdl.handle.net/2128/17276 doi:10.1063/1.4964122

Abstract: We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.

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