Journal Article

FZJ-2020-04205

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Phosphorous Catalytic‐Doping of Silicon Alloys for the Use in Silicon Heterojunction Solar Cells

Liu, Y. ; Pomaska, M.FZJ* ; Duan, W.FZJ* ; Kim, D. Y. ; Köhler, M.FZJ* ; Breuer, U.FZJ* ; Ding, K. (Corresponding author)FZJ*

2020
Deutsche Gesellschaft für Materialkunde Frankfurt, M.

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Please use a persistent id in citations: http://hdl.handle.net/2128/27025  doi:10.1002/adem.201900613

Abstract: Herein, the effectiveness of post‐deposition catalytic‐doping (cat‐doping) on various doped silicon alloys, i.e., microcrystalline silicon (μc‐Si:H), nanocrystalline silicon oxide (nc‐SiOx:H), and microcrystalline silicon carbide (μc‐SiC:H), for the use in silicon heterojunction solar cells is investigated. Phosphorous (P) profiles by secondary ion mass spectrometry (SIMS) reveal the P distribution and its difference in these three silicon alloy films. Conductivity and effective charge carrier lifetime of different samples are found to increase to different extents after cat‐doping process. Coexistence of thermal annealing, hydrogenation, and phosphorus doping is confirmed by using different gases during the cat‐doping process.

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Contributing Institute(s):

1. Photovoltaik (IEK-5)

Research Program(s):

1. 121 - Solar cells of the next generation (POF3-121) (POF3-121)

Appears in the scientific report 2020

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Engineering, Computing and Technology ; DEAL Wiley ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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