Journal Article

FZJ-2021-01382

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Efficient large field of view electron phase imaging using near-field electron ptychography with a diffuser

Allars, F. ; Lu, P.-H.FZJ* ; Kruth, M.FZJ* ; Dunin-Borkowski, R. E.FZJ* ; Rodenburg, J. M. ; Maiden, A. M. (Corresponding author)

2021
Elsevier Science Amsterdam

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Please use a persistent id in citations: http://hdl.handle.net/2128/29348  doi:10.1016/j.ultramic.2021.113257

Abstract: Most implementations of ptychography on the electron microscope operate in scanning transmission (STEM) mode, where a small focussed probe beam is rapidly scanned across the sample. In this paper we introduce a different approach based on near-field ptychography, where the focussed beam is replaced by a wide-field, structured illumination, realised through a purpose-designed etched Silicon Nitride window. We show that fields of view as large as 100μm [2] can be imaged using the new approach, and that quantitative electron phase images can be reconstructed from as few as nine near-field diffraction pattern measurements.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)

Research Program(s):

1. 535 - Materials Information Discovery (POF4-535) (POF4-535)
2. ESTEEM3 - Enabling Science and Technology through European Electron Microscopy (823717) (823717)
3. Q-SORT - QUANTUM SORTER (766970) (766970)

Appears in the scientific report 2021

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