Journal Article

FZJ-2022-04511

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Transparent Conductive Oxide Sputtering Damage on Contact Passivation in Silicon Heterojunction Solar Cells with Hydrogenated Nanocrystalline Silicon

Qiu, D.FZJ* ; Duan, W. (Corresponding author)FZJ* ; Lambertz, A.FZJ* ; Eberst, A.FZJ* ; Bittkau, K.FZJ* ; Rau, U.FZJ* ; Ding, K.FZJ*

2022
Wiley-VCH Weinheim

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Please use a persistent id in citations: http://hdl.handle.net/2128/32701  doi:10.1002/solr.202200651

Abstract: Mitigating the adverse effect of transparent conductive oxide (TCO) sputtering onthe passivation quality of the heterojunction contact is very critical for achievinghigh-efficiency silicon heterojunction (SHJ) solar cells. Herein, n-type ultra-thin(5 nm) nanocrystalline silicon (nc-Si:H) is utilized as a contact layer in rear-junctionSHJ solar cells. It is revealed that the TCO sputtering damage on the contact layer iscaused by the ion bombardment during the sputtering process and cannot be fullyrecovered by low-temperature annealing. A more severe passivation deteriorationis observed for the devices with nc-Si:H(n) having a higher microstructure factor.This result is explained by an increased ion penetration depth in the porous nc-Si:Hfilm. By applying denser nc-Si:H(n) in SHJ solar cells, the front silicon film stackshows more resilience to sputter damage, yielding a remarkable cell performanceon the M2-size wafer with certificated power conversion efficiency (η) of 23.87%.The sputter damage on nc-Si:H by TCO in SHJ solar cells is explored in depth forthe first time from the perspective of silicon thin films.

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Contributing Institute(s):

1. Photovoltaik (IEK-5)

Research Program(s):

1. 1213 - Cell Design and Development (POF4-121) (POF4-121)
2. Verbundvorhaben: Street - Einsatz von hocheffizienten Solarzellen in elektrisch betriebenen Nutzfahrzeugen; Teilvorhaben: Herstellung und Entwicklung von (0324275E) (0324275E)
3. Verbundvorhaben: TuKaN - Tunnelkontakte auf N-Typ: für die Metallisierung mit Siebdruck, Teilvorhaben: Herstellung von Solarzellen mit passivierendem Tunnelkontakt und funktionalen Schichten aus katalytischer und plasmaunterstützter chemischer Gasphasenab (0324198D) (0324198D)
4. Touch - Technologie- und Charakterisierungsplattform für die Entwicklung von hoch-effizienten Silizium-Heterostruktursolarzellen (0324351) (0324351)

Appears in the scientific report 2022

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; DEAL Wiley ; Essential Science Indicators ; IF >= 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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