Journal Article FZJ-2023-00741

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DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images



2022
Springer Singapore [Singapore]

Nanomanufacturing and metrology 5(2), 101 - 111 () [10.1007/s41871-022-00137-7]

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Abstract: Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as intuitive presentation of the resolved atomic structures.

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Contributing Institute(s):
  1. Materialwissenschaft u. Werkstofftechnik (ER-C-2)
Research Program(s):
  1. 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535) (POF4-535)

Appears in the scientific report 2022
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Medline ; Creative Commons Attribution CC BY 4.0 ; OpenAccess ; DEAL Springer ; SCOPUS
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 Record created 2023-01-17, last modified 2024-12-10


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