Journal Article

FZJ-2023-02018

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png TiN-NbN-TiN and Permalloy Nanostructures for Applications in Transmission Electron Microscopy

Faley, M. I. (Corresponding author)FZJ* ; Williams, J.FZJ* ; Lu, P.FZJ* ; Dunin-Borkowski, R. E.FZJ*

2023
MDPI Basel

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Please use a persistent id in citations: http://hdl.handle.net/2128/34386  doi:10.3390/electronics12092144

Abstract: We fabricated superconducting and ferromagnetic nanostructures, which are intended for applications in transmission electron microscopy (TEM), in a commercial sample holder that can be cooled using liquid helium. Nanoscale superconducting quantum-interference devices (nanoSQUIDs) with sub-100 nm nanobridge Josephson junctions (nJJs) were prepared at a distance of ~300 nm from the edges of a 2 mm × 2 mm × 0.05 mm substrate. Thin-film TiN-NbN-TiN heterostructures were used to optimize the superconducting parameters and enhance the oxidation and corrosion resistance of nJJs and nanoSQUIDs. Non-hysteretic I(V) characteristics of nJJs, as well as peak-to-peak quantum oscillations in the V(B) characteristics of the nanoSQUIDs with an amplitude of up to ~20 µV, were obtained at a temperature ~5 K, which is suitable for operation in TEM. Electron-beam lithography, high-selectivity reactive ion etching with pure SF6 gas, and a naturally created undercut in the Si substrate were used to prepare nanoSQUIDs on a SiN membrane within ~500 nm from the edge of the substrate. Permalloy nanodots with diameters down to ~100 nm were prepared on SiN membranes using three nanofabrication methods. High-resolution TEM revealed that permalloy films on a SiN buffer have a polycrystalline structure with an average grain dimension of approximately 5 nm and a lattice constant of ~0.36 nm. The M(H) dependences of the permalloy films were measured and revealed coercive fields of 2 and 10 G at 300 and 5 K, respectively. These technologies are promising for the fabrication of superconducting electronics based on nJJs and ferromagnetic nanostructures for operation in TEM.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)

Research Program(s):

1. 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535) (POF4-535)

Appears in the scientific report 2023

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Database coverage:
; ; ; ; Clarivate Analytics Master Journal List ; Current Contents - Engineering, Computing and Technology ; DOAJ Seal ; IF < 5 ; JCR ; SCOPUS ; Web of Science Core Collection

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