Contribution to a conference proceedings/Contribution to a book

FZJ-2025-04492

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Multimodal In Situ Electron Microscopy Platform for Correlative Electro-Thermal Characterization and Failure Analysis

Zheng, H. ; Pivak, Y. ; Rossum, C. D. ; Andersen, M. ; Pen, M. ; Basak, S.FZJ* ; Eichel, R.-A.FZJ*RWTH* ; Garza, H. P.

2025

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Please use a persistent id in citations: doi:10.31399/asm.cp.istfa2025p0567

Abstract: We introduce a correlative in situ platform for electro-thermal studies in both TEM and SEM using the same MEMS-based Nano-Chip. Equipped with up to eight electrodes, the chip enables precise electrical biasing and localized heating of as prepared samples under real operating conditions. A dedicated SEM holder ensures seamless, damage-free transfer from TEM, combining atomic-scale imaging with SEM analytics (EDX, EBSD, TKD) and optional AFM integration. Designed for semiconductor materials, the system captures real-time structural evolution during heating and biasing, delivering artifact-free, multimodal insights for semiconductor reliability, device optimization, and advanced materials development.

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Contributing Institute(s):

1. Grundlagen der Elektrochemie (IET-1)

Research Program(s):

1. 1231 - Electrochemistry for Hydrogen (POF4-123) (POF4-123)

Appears in the scientific report 2025

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