Journal Article

PreJuSER-111842

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Features of temperature dependence of contact resistivity in ohmic contacts on lapped n-Si

Sachenko, A. V. ; Belyaev, A. E. ; Boltovets, N. S. ; Vinogradov, A. O. ; Kladko, V. P. ; Konakova, R. V. ; Kudryk, Y. ; Kuchuk, A. V. ; Sheremet, V. N. ; Vitusevich, S. A.FZJ*

2012
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/7801  doi:10.1063/1.4752715

Abstract: The temperature dependence of contact resistivity rho(c) in lapped silicon specimens with donor concentrations of 5 x 10(16), 3 x 10(17), and 8 x 10(17) cm(-3) was studied experimentally. We found that, after decreasing part of the rho(c)(T) curve in the low temperature range, an increasing part is registered with increasing temperature T. It is demonstrated that the formation of contact to a lapped Si wafer results in the generation of high dislocation density in the near-surface region of the semiconductor and also in ohmic contact behavior. In this case, current flows through the metal shunts associated with dislocations. The theory developed is in good agreement with experimental results. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4752715]

Keyword(s): J

Note: The authors at ISP acknowledge financial support from the National Academy of Sciences of Ukraine (program "Fundamental problems of nanostructured systems, nanomaterials and nanotechnology") and State program of Ukraine "Nanotechnology and nanomaterials."

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Contributing Institute(s):

1. Bioelektronik (ICS-8)
2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
3. Bioelektronik (PGI-8)

Research Program(s):

1. Grundlagen für zukünftige Informationstechnologien (P42)
2. BioSoft: Makromolekulare Systeme und biologische Informationsverarbeitung (P45)

Appears in the scientific report 2012

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Database coverage:
; ; ; Allianz-Lizenz / DFG ; Current Contents - Social and Behavioral Sciences ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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