Journal Article FZJ-2024-04929

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Composition dependence of intrinsic surface states and Fermi-level pinning at ternary Al x Ga1− x N m -plane surfaces

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2024
Inst. New York, NY

Journal of vacuum science & technology / A 42(2), 023202 () [10.1116/6.0003225]

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Abstract: Growth on nonpolar group III-nitride semiconductor surfaces has been suggested to be a remedy for avoiding detrimental polarization effects. However, the presence of intrinsic surface states within the fundamental bandgap at nonpolar surfaces leads to a Fermi-level pinning during growth, affecting the incorporation of dopants and impurities. This is further complicated by the use of ternary, e.g., Al(x)Ga(1-x)N layers in device structures. In order to quantify the Fermi-level pinning on ternary group III nitride nonpolar growth surface, the energy position of the group III-derived empty dangling bond surface state at nonpolar Al(x)Ga(1-x)N (10-10) surfaces is determined as a function of the Al concentration using cross-sectional scanning tunneling microscopy and spectroscopy. The measurements show that the minimum energy of the empty dangling bond state shifts linearly toward midgap for increasing Al concentration with a slope of  ~5 meV/%. These experimental findings are supported by complementary density functional theory calculations.

Classification:

Contributing Institute(s):
  1. Physik Nanoskaliger Systeme (ER-C-1)
Research Program(s):
  1. 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535) (POF4-535)
  2. DFG project 398305088 - Grundlegende Eigenschaften nicht-polarer Oberflächen von ternären Gruppe-III-Nitrid-Verbindungshalbleitern (398305088) (398305088)

Appears in the scientific report 2024
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Medline ; Creative Commons Attribution CC BY 4.0 ; OpenAccess ; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection
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 Record created 2024-07-19, last modified 2025-02-04


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